Add to ORKGA Central—Composite Full Factorial design was performed in aiming to optimize the develop and bake processes on KTI 820 resist and KTI 934 developer using the GCA Wafertrac. The responses looked at were critical dimension and resist thickness after development with the independent variables of postbake temperature, postbake time and developer time. Analysis of the data was done using SAS as a software tool
This article addressed heat conduction in microelectronics applications. ANSYS finite element design...
Several chemical and biological processes have been investigated and predicted using Response Surfac...
In the injection moulding, the process parameters setting have crucial effects on the quality of pro...
A Central—Composite Full Factorial design was performed in aiming to optimize the develop and bake p...
Response surface methodology (RSM) is a very efficient tool to provide a good practical insight into...
In this review chapter, the authors presented a systematic exposition to the concept of Response Sur...
In any product and process optimization, the use of the traditional OFAT approach examines only one...
Response Surface Methodology (RSM) is a set of techniques that includes (i) designing of experiment...
A method of incorporating statistically designed fractional factorial experiments into lithographic ...
This article describes the recent package rsm, which was designed to provide R support for standard ...
Not AvailableResponse surface methodology is used (i) to determine and to quantify the relationship ...
Statistical design of experiments (DoE), a computer-aided optimization technique, provides many bene...
3noResponse Surface Methods (RSMs) are statistical and numerical models that approximate the relati...
where the cost of experimentation is high or when the experimentation resources are limited. In this...
Experimental analysis via the Perkin Elmer Development Rate Monitor (DRM) has determined that KTI-82...
This article addressed heat conduction in microelectronics applications. ANSYS finite element design...
Several chemical and biological processes have been investigated and predicted using Response Surfac...
In the injection moulding, the process parameters setting have crucial effects on the quality of pro...
A Central—Composite Full Factorial design was performed in aiming to optimize the develop and bake p...
Response surface methodology (RSM) is a very efficient tool to provide a good practical insight into...
In this review chapter, the authors presented a systematic exposition to the concept of Response Sur...
In any product and process optimization, the use of the traditional OFAT approach examines only one...
Response Surface Methodology (RSM) is a set of techniques that includes (i) designing of experiment...
A method of incorporating statistically designed fractional factorial experiments into lithographic ...
This article describes the recent package rsm, which was designed to provide R support for standard ...
Not AvailableResponse surface methodology is used (i) to determine and to quantify the relationship ...
Statistical design of experiments (DoE), a computer-aided optimization technique, provides many bene...
3noResponse Surface Methods (RSMs) are statistical and numerical models that approximate the relati...
where the cost of experimentation is high or when the experimentation resources are limited. In this...
Experimental analysis via the Perkin Elmer Development Rate Monitor (DRM) has determined that KTI-82...
This article addressed heat conduction in microelectronics applications. ANSYS finite element design...
Several chemical and biological processes have been investigated and predicted using Response Surfac...
In the injection moulding, the process parameters setting have crucial effects on the quality of pro...