Determining spectral sensitivity of Kodak Micro Positive Resist 820

The spectral sensitivity of KODAK Micro Positive Resist 820 has been determined for the spectral range of 300nm to 500nm. A xenon-source monochrometer was used in a hard contact exposing system. Se/isitivity is defined as the inverse of the exposure (mj/cm ) needed to produce an image in a photoresist coated plate having walls of 70 normal slope. Low intensity reciprocity law failure has been conclusively shown to exist in this resist with exposure intensities of 100 mw/cm and below. Guide lines have been drawn up, based on the procedures and results of the experimentation, to assist photoresist users in determining the spectral sensitivity of a photoresist. The feasibility of these procedures has been determined to be positive