International audienceThis paper present a two dimensional pneumatic actuator based on silicon MEMS technology for objects micro-manipulation using tilted air jets. The device is composed of three layers stacked together, two micro-machined silicon wafers and a Pyrex glass wafer. The system is composed of a set of micro-conveyors in about 9 mm × 9 mm area. Each micro-conveyor has four nozzles and can generate tilted air-jets which allow four conveyance directions. An experiment of the conveyance of a silicon chip of 3 mm diameter and weighing approximately 2 mg was performed with pulsed air flow
Compliant pneumatic micro-actuators are interesting for applications requiring large strokes and for...
This thesis presents the design, the modeling and the control of a pneumatic manipulator based on an...
This letter reports a compact, versatile, and user-friendly micromanipulator that uses an elasticall...
7 pagesInternational audienceThis paper present a two dimensional pneumatic actuator based on silico...
International audienceA two dimensional pneumatic actuator based on silicon MEMS technology for obje...
International audienceThis paper presents the design, fabrication and testing of a new two-dimension...
In this paper, we present latest results of a thermopneumatic microactuator based on polymer membran...
International audienceThe micro-conveyor is a 9 x 9 mm2 manipulation surface able to move millimeter...
from the thesis or use of any of the information contained in it must acknowledge this thesis as the...
This paper presents modelling and design optimization of a microfeeder which, as part of a microasse...
In this paper, a micro pneumatic end-effector for micromanipulation and microassembly with in-situ P...
We demonstrate a non-contact technique to apply calibrated and localized forces in the micro-Newton ...
Abstract- This paper describes the design and development of a 6 degree of freedom robotic manipulat...
Abstract A four degree of freedom thermally actuated MEMS microgripper is presented in this paper. ...
Work in progress at Sandia National Laboratories (SNL) has led to the development of a family of mic...
Compliant pneumatic micro-actuators are interesting for applications requiring large strokes and for...
This thesis presents the design, the modeling and the control of a pneumatic manipulator based on an...
This letter reports a compact, versatile, and user-friendly micromanipulator that uses an elasticall...
7 pagesInternational audienceThis paper present a two dimensional pneumatic actuator based on silico...
International audienceA two dimensional pneumatic actuator based on silicon MEMS technology for obje...
International audienceThis paper presents the design, fabrication and testing of a new two-dimension...
In this paper, we present latest results of a thermopneumatic microactuator based on polymer membran...
International audienceThe micro-conveyor is a 9 x 9 mm2 manipulation surface able to move millimeter...
from the thesis or use of any of the information contained in it must acknowledge this thesis as the...
This paper presents modelling and design optimization of a microfeeder which, as part of a microasse...
In this paper, a micro pneumatic end-effector for micromanipulation and microassembly with in-situ P...
We demonstrate a non-contact technique to apply calibrated and localized forces in the micro-Newton ...
Abstract- This paper describes the design and development of a 6 degree of freedom robotic manipulat...
Abstract A four degree of freedom thermally actuated MEMS microgripper is presented in this paper. ...
Work in progress at Sandia National Laboratories (SNL) has led to the development of a family of mic...
Compliant pneumatic micro-actuators are interesting for applications requiring large strokes and for...
This thesis presents the design, the modeling and the control of a pneumatic manipulator based on an...
This letter reports a compact, versatile, and user-friendly micromanipulator that uses an elasticall...