Formation of highly conformal spinel lithium titanate thin films based on a novel three-step atomic layer deposition process
- Bönhardt, S.
- Kühnel, K.
- Kia, A.M.
- Weinreich, W.
DOIAbstract
Lithium titanate (Li4Ti5O12) (LTO) has several promising properties with regard to energy storage. The most important is its low volume expansion during lithium (de-) intercalation enabling the material for complex three-dimensional battery anode designs. To employ this property at a small scale, e.g., for micro batteries (<100 nm active layer thickness), a highly conformal deposition process like atomic layer deposition (ALD) is needed. However, the ALD of lithium containing layers is quite ambitious. Particularly, thermally activated deposition of lithium containing layers with water as a coreactant is challenging due to the high reactivity and hygroscopic nature of many lithium compounds, e.g., lithium hydroxide. That is why a novel ALD ...
Add to ORKG