Single Crystal Diamond Membranes and Photonic Resonators Containing Germanium Vacancy Color Centers

Copyright © 2018 American Chemical Society. Single crystal diamond membranes that host optically active emitters are highly attractive components for integrated quantum nanophotonics. In this work we demonstrate bottom-up synthesis of single crystal diamond membranes containing germanium vacancy (GeV) color centers. We employ a lift-off technique to generate the membranes and perform chemical vapor deposition in the presence of a germanium source to realize the in situ doping. Finally, we show that these membranes are suitable for engineering of photonic resonators such as microdisk cavities with quality factors of ∼1500. The robust and scalable approach to engineer single crystal diamond membranes containing emerging color centers is a promising pathway for the realization of diamond integrated quantum nanophotonic circuits on a chip