Add to ORKGA composition is derived from an addition polymerizable organotitanium polymer which upon exposure to an oxygen plasma or baking in air, is converted to titanium dioxide (titania) or is converted to a mixed, titanium-containing metal oxide. The metal oxide formed in situ imparts etch- resistant action to a patterned photoresist layer. The composition may also be directly deposited and patterned into permanent metal oxide device features by a photolithographic process
In this thesis, new sol-gel templating methods for the synthesis of titanium dioxide (TiO2) based ca...
Most of the topics dealt with in this thesis belong to surface science. The starting point was the f...
Graduation date: 2009Patterning of metal oxides typically involves a multi step process, involving \...
Provided herein are photoresist compositions for use particularly in 193 nm lithography. These compo...
In hybrid organic solar cells a blocking layer between transparent electrode and nanocrystalline tit...
To improve the current materials for stereolithography, titania (TiO2) was added as a nanofiller. Ti...
This project explores polyoxometalate structures for use as EUV lithography photoresists; harnessing...
PhD ThesisTitanium dioxide, "titania" is used for a wide range of everyday applications, such as in...
We demonstrate a method for embossing titania sol−gel precursor with poly(methyl methacrylate) (PMMA...
A direct one-step and low temperature micro-fabrication process, enabling to realize large area tota...
The work in this dissertation is divided into two distinct projects. The majority of this dissertati...
The work in this dissertation is divided into two distinct projects. The majority of this dissertati...
The goal of this dissertation is to synthesize and characterize novel polymers designated as resists...
This diploma thesis deals with the synthesis of an organosilica polymer which could be used as a bin...
A method for etching or removing polymers, photoresists, and organic contaminants from a substrate i...
In this thesis, new sol-gel templating methods for the synthesis of titanium dioxide (TiO2) based ca...
Most of the topics dealt with in this thesis belong to surface science. The starting point was the f...
Graduation date: 2009Patterning of metal oxides typically involves a multi step process, involving \...
Provided herein are photoresist compositions for use particularly in 193 nm lithography. These compo...
In hybrid organic solar cells a blocking layer between transparent electrode and nanocrystalline tit...
To improve the current materials for stereolithography, titania (TiO2) was added as a nanofiller. Ti...
This project explores polyoxometalate structures for use as EUV lithography photoresists; harnessing...
PhD ThesisTitanium dioxide, "titania" is used for a wide range of everyday applications, such as in...
We demonstrate a method for embossing titania sol−gel precursor with poly(methyl methacrylate) (PMMA...
A direct one-step and low temperature micro-fabrication process, enabling to realize large area tota...
The work in this dissertation is divided into two distinct projects. The majority of this dissertati...
The work in this dissertation is divided into two distinct projects. The majority of this dissertati...
The goal of this dissertation is to synthesize and characterize novel polymers designated as resists...
This diploma thesis deals with the synthesis of an organosilica polymer which could be used as a bin...
A method for etching or removing polymers, photoresists, and organic contaminants from a substrate i...
In this thesis, new sol-gel templating methods for the synthesis of titanium dioxide (TiO2) based ca...
Most of the topics dealt with in this thesis belong to surface science. The starting point was the f...
Graduation date: 2009Patterning of metal oxides typically involves a multi step process, involving \...