Add to ORKGThis study describes the effect of variations in shape and membrane thickness in capacitive pressure sensors. Specifically, square, rectangular and circular shapes were considered with three different membrane thicknesses. Capacitive changes and membrane deformations with respect to pressure variation were computed using the IntelliSuite simulation software, and the sensitivity of the sensor was assessed. Square-shaped pressure sensor with least membrane thickness was found to be more sensitive than the circular and rectangular shaped sensors, with the rectangular one showing the least sensitivity
Sensors are devices that convert a physical stimulus into an electrical signal. Mechanical stimuli s...
Abstract—A simulation program is developed which is capable of calculating the output responses of p...
This paper reports on the optimization of flexible PDMS-based normal pressure capacitive microsensor...
The shape of Micropressure sensors has influence on their accuracy. In this paper, a rectangular mem...
Capacitive sensors for the detection of mechanical quantities all rely on a displacement measurement...
Abstract: This article reports on the design of a capacitive pressure sensor fabricated in non-silic...
Polymer-based conductive membranes play an important role in the development of elastic deflection-b...
Surface stress-based measurement is a relatively new mechanism in biological and chemical sensing. T...
The capacitive pressure sensor based on thin film elastic deflection and a parallel plate capacitor ...
In this paper, mathematical modeling and simulation of a MEMS-based clamped square-shape membrane fo...
Flexible pressure sensors are increasingly being used in medical and non-medical applications, and p...
The static response of capacitive pressure sensors with a thin rectangular or square diaphragm is st...
This paper presents a pressure sensor based on a variable capacitor formed by a movable polysilicon ...
Abstract A flexible pressure sensor with a linear response over a wide pressure range with high sens...
MEMS pressure sensors are tiny systems fabricated with technologies inherited from integrated circui...
Sensors are devices that convert a physical stimulus into an electrical signal. Mechanical stimuli s...
Abstract—A simulation program is developed which is capable of calculating the output responses of p...
This paper reports on the optimization of flexible PDMS-based normal pressure capacitive microsensor...
The shape of Micropressure sensors has influence on their accuracy. In this paper, a rectangular mem...
Capacitive sensors for the detection of mechanical quantities all rely on a displacement measurement...
Abstract: This article reports on the design of a capacitive pressure sensor fabricated in non-silic...
Polymer-based conductive membranes play an important role in the development of elastic deflection-b...
Surface stress-based measurement is a relatively new mechanism in biological and chemical sensing. T...
The capacitive pressure sensor based on thin film elastic deflection and a parallel plate capacitor ...
In this paper, mathematical modeling and simulation of a MEMS-based clamped square-shape membrane fo...
Flexible pressure sensors are increasingly being used in medical and non-medical applications, and p...
The static response of capacitive pressure sensors with a thin rectangular or square diaphragm is st...
This paper presents a pressure sensor based on a variable capacitor formed by a movable polysilicon ...
Abstract A flexible pressure sensor with a linear response over a wide pressure range with high sens...
MEMS pressure sensors are tiny systems fabricated with technologies inherited from integrated circui...
Sensors are devices that convert a physical stimulus into an electrical signal. Mechanical stimuli s...
Abstract—A simulation program is developed which is capable of calculating the output responses of p...
This paper reports on the optimization of flexible PDMS-based normal pressure capacitive microsensor...