Piezoelectric 1-3 composites for high frequency ultrasonic transducer applications

A new net shape process has been developed to fabricate 1-3 piezocomposites. Solid polymer moulds and high solid loading lead zirconate titanate (PZT) paste, made by the viscous polymer processing (VPP), have been utilised in an embossing/lost mould method. 1-3 structures with PZT pillar feature sizes of 50-100 µm and aspect ratios of 5-10 have been fabricated successfully, and the composites have been characterized by electrical impedance and pulse-echo measurements. The results show that the viscous polymer processing is a very promising technique for the fabrication of 1-3 composites for high frequency ultrasonic transducer applications