Controller of three-axis nano-metric manipulator

This diploma thesis describes the piezoelectric phenomenon and its use for positioning with nanometric precision in laboratory use. In the thesis is description of direct and indirect piezoelectric phenomenon, various types of piezoelectric actuators and ways of their control with the aim of eliminating their hysteresis. The goal is to design a controller for piezo actuator built in the three-axis nanometric manipulator Thorlabs MAX341/M