Optimization of Carbon atomic source for graphene layer growth by MBE method

This bachelor’s thesis deals with the development and optimization of an atomic source of carbon atoms with the thermal energy (0.1÷1 eV). An atomic beam in the conditions of ultrahigh vacuum is considered to be a suitable source of superior graphene layers also due to the high purity of the method. The first part of this work describes graphene as a material and the method of molecular beam epitaxy. The second part is dedicated to the description of an assembly of the carbon source and its optimization which also concludes with experimental data obtained from measurement of the deposited carbon layers on various substrates (Cu, Ge, Al2O3, SiO2)