Scattering light measurement of optical surfaces using a new dynamic angle limited integrated scattering method

The dynamic angle limited integrated scattering (DALIS) method has been developed to examine optically smooth reflective surfaces with well-defined form. The DALIS system shows advantages over the conventional angle-resolved scattering. We propose a new configuration and results in the DALIS method by using a spherical mirror as a collecting element of the scattered light from the surface of a sample under test. Furthermore, the proposed method improves the detection of the scattered light and is suitable to be applied in workshop inspection during optical polishing processes. © 2010 Society of Photo-Optical Instrumentation