TOWARDS FABRICATION OF ULTRA-THIN PIEZOELECTRIC CAPACITOR FOR TACTILE SENSING

Tactile sensors plays a very important role in the present world of sensors, especially in the field of robotics and invasive surgery. For these kind of sensors, piezoelectric polymers as polyvinylidene fluoride trifluoroethylene (PVDF-TrFE) can represent an interesting choice as they can be potentially inexpensive to manufacture, thus reducing the fabrication cost. Nevertheless, capacitive tactile sensors based on piezoelectric materials when integrated with flexible CMOS electronics can provide bendable, lightweight and robust sensing devices. In this work we present a flexible piezoelectric capacitive sensor, based on PVDF-TrFE, fabricated on a ultra-thin monocrystalline silicon