Design and manufacturing of X-Band tunable microcavity resonator in MEMS technology

This paper presents the design modeling and hardwire prototypes fabrication of a X-band tunable cavity resonator based on MEMS technology. Brass metallic cavities with inner post have been thermo-compressive bonded on a silicon substrates having 4 MEMS varactors based on toggle mechanism. The tunable resonator was simulated in ANSYS® HFSS full wave environment, resulting in a continuous tuning range of 22% with an unloaded quality factor (Q) in the range of 80-180 and a very small volume of 3.2x3.2x1.4 mm3. Preliminary experimental results are presented. The measurements on hardwired prototypes result in a maximum unloaded quality factor (Q) of 80 and tuning range of 14%, centered at the frequency of about 9GHz. The main responsible of the lower measured quality factor, respect to the simulated one, was found to be the additional losses in the silicon substrate