Characterization and deposition techniques of SWCNTs for micro-devices applications

In the last years, carbon nanotubes present many areas of application in sensors-based technology (e.g. gas sensors for environmental monitoring, sensors for bioaffinity assays, DNA sensors). The possibility to implement nanotubes as interface for improving the adhesion properties between cell and Microelectrode Arrays (MEAs) in electrophysiological assays (e.g. neuronal cells line) has been also proposed. In this field different applications require selecting the most suitable and well characterized methodologies for nanotubes deposition and growth. To realize this objective, an important task is to guarantee at the meantime lifetime, device reproducibility and reduced dispersion effects after a nanotubes deposition procedure. This is a key factor if a fabrication technology has to be selected and implemented in a device batch production perspective. In spite of tremendous efforts done in this field at the present state-of-the-art this still is an open issue. We report our approach to synthesis and characterization of SWNTs, and two different methodologies for CNT deposition, aimed to be implemented in a micro-fabrication process for a large series production of micro-devices [1-7]. Gas sensors and MEAs have been proposed as technological platforms to evaluate the reported methodologies. Future works will be addressed to the optimization of the full cycle of the device microfabrication line