An Active Self-Recovery Mechanism to Restore the Operability of RF-MEMS Switches Affected by Stiction

MicroElectroMechanical switches for Radio Frequency applications, namely RF-MEMS, have been demonstrated to exhibit remarkable performance, like very low-loss, high Q-Factor and good linearity, thus enabling the manufacturing of low-cost lumped elements (switches, variable capacitors and inductors) as well as of complex networks as phase shifters for antenna/radar applications, power dividers and switching units and matrices