Add to ORKGIn this paper, the technology for the realization of micromachined millimeter wave devices on dielectric membranes will be described. Examples of filters and antennas obtained on thin trilayers made by SiO2/Si3/SiO2 structures will be given, and their microwave response will be shown
This dissertation presents a comprehensive demonstration of the ability of membrane-supported transm...
This paper presents the design methodology for the micromachined circuits operating in the microwave...
Recent developments in micromachining techniques at the University of Michigan have resulted in nove...
This paper presents the fabrication processes for micromachined millimetre-wave devices, on two diff...
The fabrication of planar microwave devices is becoming very promising for many applications. It is ...
In the last years a lot of studies were focused on micromachining for high-performance microwave and...
This thesis represents a detailed investigation of high-frequency transmission lines which are suppo...
A review of recent developments of membrane supported millimeter wave circuits based on GaAs microma...
In this paper theoretical, technological and experimental results on a millimeter wave micromachined...
International audienceThis paper presents an original technique for implementing membrane structures...
ABSTRACT: Recent developments in micromachining techniques at the University of Michigan have result...
All microwave and millimeter-wave systems are made of monolithic microwave integrated circuits (MMIC...
This paper presents the manufacturing of micromachined Yagi-Uda antennae for applications in the mil...
International audienceThis paper presents a new technological process to implement efficient millime...
The micromachining technique is suitable of interesting applications at microwave and millimeter wav...
This dissertation presents a comprehensive demonstration of the ability of membrane-supported transm...
This paper presents the design methodology for the micromachined circuits operating in the microwave...
Recent developments in micromachining techniques at the University of Michigan have resulted in nove...
This paper presents the fabrication processes for micromachined millimetre-wave devices, on two diff...
The fabrication of planar microwave devices is becoming very promising for many applications. It is ...
In the last years a lot of studies were focused on micromachining for high-performance microwave and...
This thesis represents a detailed investigation of high-frequency transmission lines which are suppo...
A review of recent developments of membrane supported millimeter wave circuits based on GaAs microma...
In this paper theoretical, technological and experimental results on a millimeter wave micromachined...
International audienceThis paper presents an original technique for implementing membrane structures...
ABSTRACT: Recent developments in micromachining techniques at the University of Michigan have result...
All microwave and millimeter-wave systems are made of monolithic microwave integrated circuits (MMIC...
This paper presents the manufacturing of micromachined Yagi-Uda antennae for applications in the mil...
International audienceThis paper presents a new technological process to implement efficient millime...
The micromachining technique is suitable of interesting applications at microwave and millimeter wav...
This dissertation presents a comprehensive demonstration of the ability of membrane-supported transm...
This paper presents the design methodology for the micromachined circuits operating in the microwave...
Recent developments in micromachining techniques at the University of Michigan have resulted in nove...