A Post-Design of Topology Optimization for Mechanical Compliant Amplifier in MEMS

[[abstract]]The topology synthesis approach can generate a creative initial optimized configuration and can generate approximately well locations of hinges. It is particularly useful to form a monolithic compliant mechanism in MEMS application. However, the formation of hinges-like portion is typically encountered as a major unsolved problem. Such hinges unavoidably exist in the topological layout but cannot practically manufacture. This paper proposes an approach using the analytic single-axis flexure hinge integrated with the formal optimization as a post-design process to obtain optimum flexure hinges and its location for promoting the overall performance. A compliant micro gripper/magnifying mechanism is adopted as an example to illustrate the presenting approach; and a multi-objective optimization problem consisting of several constraints are constructed to determine nine unknowns. The numerical experiment shows the proposed post-optimum design is effective and can be utilized to other similar design situation.[[journaltype]]國際[[incitationindex]]EI[[countrycodes]]TW