Si/SiGe bound-to-continuum quantum cascade emitters

Si/SiGe bound-to-continuum quantum cascade emitters designed by self-consistent 6-band k.p modeling and grown by low energy plasma enhanced chemical vapour deposition are presented demonstrating electroluminescence between 1.5 and 3 THz. The electroluminescence is Stark shifted by an electric field and demonstrates polarized emission consistent with the design. Transmission electron microscopy and x-ray diffraction are also presented to characterize the thick heterolayer structure