Application of Thin Piezoelectric Films in DiamondBased Acoustoelectronic Devices

Текст статьи не публикуется в открытом доступе в соответствии с политикой журнала.The theory of external loading influence on acoustic parameters of piezoelectric fivelayered structure as “Al/(001) AlN/Mo/(001) diamond/Me” has been developed. Oscillations in diamond-based high-overtone bulk acoustic resonators (HBARs) have been investigated in terms of 3D FEM simulation. Peculiarities of technology of aluminum-scandium nitride (ASN) films have been discussed. Composition Al0.8Sc0.2N was obtained to create the diamond-based HBAR and SAWresonator. Application of ASN films has resulted in a drastic increasing an electromechanical coupling up to 2.5 times in comparison with aluminum nitrid