"May 1980.""DOE/JPL/955533-79-2."Cover title.Work performed under contract no. ;Mode of access: Internet
"Work Performed Under Contract No. AC02-77CH00178.""August 1980."Includes bibliographical references...
"April 1978."Includes bibliographical references (page 29).Work performed under contract no. ;Mode o...
"SERI Contract No. XS-9-8119-1.""February 1, 1980, Date Published."Cover title.Includes bibliographi...
The goal of this program is to demonstrate that a dichlorosilane-based reductive chemical vapor depo...
"February 1980."Includes bibliographical references (pages 6-7).Work performed under contract no. ;M...
The worldwide production of semiconductor grade polysilicon for electronic application has reached n...
"1 April 1977."Includes bibliographical references (page 73).Work performed under contract no.Mode o...
"January 1981."Includes bibliographical references (page 19).Work performed under contract no. ;Mode...
This thesis describes the development of a real-time control system for depositing polysilicon films...
"March 1980."Work performed for the Jet Propulsion Laboratory, California Institute of Technology.Wo...
"Issue date: December 1978."Work performed for the Jet Propulsion Laboratory, California Institute o...
Oct. 1978."Rockwell International, Electronics Research Center, Electronic Devices Division."Contrac...
"June 30, 1980."Includes bibliographical references.Annual report, April 1979-April 1980.Work perfor...
"Issue date: December, 1979."Work performed for the Jet Propulsion Laboratory, California Institute ...
"February 1980.""Work Performed Under Contract No. EG-77-C-01-4042."Includes bibliographical referen...
"Work Performed Under Contract No. AC02-77CH00178.""August 1980."Includes bibliographical references...
"April 1978."Includes bibliographical references (page 29).Work performed under contract no. ;Mode o...
"SERI Contract No. XS-9-8119-1.""February 1, 1980, Date Published."Cover title.Includes bibliographi...
The goal of this program is to demonstrate that a dichlorosilane-based reductive chemical vapor depo...
"February 1980."Includes bibliographical references (pages 6-7).Work performed under contract no. ;M...
The worldwide production of semiconductor grade polysilicon for electronic application has reached n...
"1 April 1977."Includes bibliographical references (page 73).Work performed under contract no.Mode o...
"January 1981."Includes bibliographical references (page 19).Work performed under contract no. ;Mode...
This thesis describes the development of a real-time control system for depositing polysilicon films...
"March 1980."Work performed for the Jet Propulsion Laboratory, California Institute of Technology.Wo...
"Issue date: December 1978."Work performed for the Jet Propulsion Laboratory, California Institute o...
Oct. 1978."Rockwell International, Electronics Research Center, Electronic Devices Division."Contrac...
"June 30, 1980."Includes bibliographical references.Annual report, April 1979-April 1980.Work perfor...
"Issue date: December, 1979."Work performed for the Jet Propulsion Laboratory, California Institute ...
"February 1980.""Work Performed Under Contract No. EG-77-C-01-4042."Includes bibliographical referen...
"Work Performed Under Contract No. AC02-77CH00178.""August 1980."Includes bibliographical references...
"April 1978."Includes bibliographical references (page 29).Work performed under contract no. ;Mode o...
"SERI Contract No. XS-9-8119-1.""February 1, 1980, Date Published."Cover title.Includes bibliographi...