Fabrication and characterization of oxidic conductive layers

Byly připraveny kapalné kompozice pro solgelovou depozici oxidu cíničitého dopovaného antimonem z anorganických prekurzorů chloridu cíničitého a chloridu antimonitého. Do kompozice byly dispergovány ATO nanočástice. Z této formulace byly pomocí spin coatingu připraveny tenké vrstvy. Kompozice byla podrobena termickým analýzám TGA a DSC. Plošný odpor byl změřen čtyřbodovou sondou, tloušťka a drsnost byly zjišťovány profilometricky. Vrstvy byly analyzovány metodou rentgenové difrakce (XRD), rastrovací elektronové mikroskopie (SEM), rentgenové fotoelektronové spektrometrie (XPS). Transmitance a zákal byl zjišťován spektrometricky s využitím integrační koule.Liquid composition for antimony doped tin oxide solgel deposition was prepared. Anorganic precursors of tin and antimony were used (tin(IV) chloride, antimony(III) chloride). ATO nanoparticles were dispergated in composition. This composition was used for spincoating deposition of thin films. Composition was analyzed by thermal analysis TGA and DSC. Sheet resistence of prepared samples were examined by four probe sensing. RMS roughness and thickness was measured by profilometry. Samples were analyzed by scan electron microscopy (SEM), X-ray diffraction (XRD) and X-ray photoelectron spectroscopy (XPS). Transmittance and haze were measured and calculated by UV-VIS spektrometry with integration sphere.