International audienceThis paper explores the possibility to use AlN/sapphire bilayer structure as piezoelectric material for high-temperature SAW applications in air atmosphere. In order to verify the temperature stability of AlN, homemade AlN/Sapphire samples were annealed during 2 to 20 hours, at temperatures going from 700 to 1000°C, before being characterized by ex situ X-ray diffraction (XRD), ellipsometry and secondary ion mass spectroscopy (SIMS). Ex situ SAW measurements were used to transfer the obtained results to the SAW field, while in situ investigations were conducted up to 500°C to observe the effect of temperature on the SAW signal
International audienceAluminium nitride piezoelectric thin films grown on sapphire are strong candid...
International audienceAluminium nitride piezoelectric thin films grown on sapphire are strong candid...
International audienceAluminium nitride piezoelectric thin films grown on sapphire are strong candid...
International audienceAluminum nitride on sapphire is a promising substrate for SAW sensors operatin...
International audienceAluminum nitride on sapphire is a promising substrate for SAW sensors operatin...
International audienceAluminum nitride on sapphire is a promising substrate for SAW sensors operatin...
International audienceAluminum nitride on sapphire is a promising substrate for SAW sensors operatin...
International audienceRecent studies have evidenced that Pt/AlN/Sapphire SAW devices are promising f...
International audienceRecent studies have evidenced that Pt/AlN/Sapphire SAW devices are promising f...
International audienceRecent studies have evidenced that Pt/AlN/Sapphire SAW devices are promising f...
International audienceRecent studies have evidenced that Pt/AlN/Sapphire SAW devices are promising f...
International audienceRecent studies have evidenced that Pt/AlN/Sapphire SAW devices are promising f...
International audienceAluminium nitride piezoelectric thin films grown on sapphire are strong candid...
International audienceAluminium nitride piezoelectric thin films grown on sapphire are strong candid...
International audienceAluminium nitride piezoelectric thin films grown on sapphire are strong candid...
International audienceAluminium nitride piezoelectric thin films grown on sapphire are strong candid...
International audienceAluminium nitride piezoelectric thin films grown on sapphire are strong candid...
International audienceAluminium nitride piezoelectric thin films grown on sapphire are strong candid...
International audienceAluminum nitride on sapphire is a promising substrate for SAW sensors operatin...
International audienceAluminum nitride on sapphire is a promising substrate for SAW sensors operatin...
International audienceAluminum nitride on sapphire is a promising substrate for SAW sensors operatin...
International audienceAluminum nitride on sapphire is a promising substrate for SAW sensors operatin...
International audienceRecent studies have evidenced that Pt/AlN/Sapphire SAW devices are promising f...
International audienceRecent studies have evidenced that Pt/AlN/Sapphire SAW devices are promising f...
International audienceRecent studies have evidenced that Pt/AlN/Sapphire SAW devices are promising f...
International audienceRecent studies have evidenced that Pt/AlN/Sapphire SAW devices are promising f...
International audienceRecent studies have evidenced that Pt/AlN/Sapphire SAW devices are promising f...
International audienceAluminium nitride piezoelectric thin films grown on sapphire are strong candid...
International audienceAluminium nitride piezoelectric thin films grown on sapphire are strong candid...
International audienceAluminium nitride piezoelectric thin films grown on sapphire are strong candid...
International audienceAluminium nitride piezoelectric thin films grown on sapphire are strong candid...
International audienceAluminium nitride piezoelectric thin films grown on sapphire are strong candid...
International audienceAluminium nitride piezoelectric thin films grown on sapphire are strong candid...