Analysis of decoupling capacitors inside via arrays with mutual interaction

A new method is developed to assess the effectiveness of local decoupling capacitors on parallel-plate power and ground conductors. The proposed method calculates the loop-inductance of multiple capacitors including their mutual interactions and the effect of power and ground vias. The underlying theory is based on computing the driving point impedance of a device power pin which serves as a reference in the evaluation of capacitor's effectiveness. The accuracy of the proposed method is validated by comparing the results to those from a full-wave electromagnetic simulation