Generation of oxygen, carbon and metallic ion beams by a compact microwave source

A small microwave ion source fabricated from a quartz tube and enclosed externally by a cavity has been operated with different geometries and for various gases in a cw mode. This source has been used to generate oxygen ion beams with energy as low as 5.5 eV. Beam energy spread has been measured to be less than 1 eV. By installing different metal plates on the front extraction electrode, metallic ion beams such as (Be, Cu, Al, etc.) can be produced