X-ray microscope assemblies. Final report and metrology report

This is the Final Report and Metrology Report prepared under Lawrence Livermore Laboratory Subcontract 9936205, X-ray Microscope Assemblies. The purpose of this program was to design, fabricate, and perform detailed metrology on an axisymmetric grazing-incidence x-ray microscope (XRMS) to be used as a diagnostic instrument in the Lawrence Livermore Laser Fusion Program. The optical configuration chosen for this device consists of two internally polished surfaces of revolution: an hyperboloid facing the object; and a confocal, co-axial elliposid facing the image. This arrangement is known as the Wolter Type-I configuration. The grazing angle of reflection for both surfaces is approximately 1/sup 0/. The general optical performance goals under this program were to achieve a spatial resolution in the object plane in the soft x-ray region of approximately 1 micron, and to achieve an effective solid collecting angle which is an appreciable fraction of the geometric solid collecting angle