Synthesis and properties of nanostructures formed by sputter deposition

Nanoscale grain structures can be created in many materials by high rate sputter deposition upon an appropriate substrate. By controlling the sputtering parameters of substrate temperature, deposition rate, and substrate bias, the scale of microstructure can vary from amorphous to grain sizes typical of conventionally treated material. The morphology and size of the microstructure will also be controlled by post-deposition heat treatment, particularly in the heat treatment of amorphous and metastable phases. Examples are given of nanostructural development in sputter-deposited pure metals, stainless steel alloys, and intermetallic compounds. Some properties of these nanostructures such as microhardness and yield strength have been evaluated and shown to be a strong function of the grain size. The structure and properties of nanolayered Cu-Mo composites produced by sputter deposition are discussed. Synthesis of materials at low temperature using displacement reactions of layered composite is demonstrated. 16 refs., 10 figs