Precision moisture generation and measurement.

In many industrial processes, gaseous moisture is undesirable as it can lead to metal corrosion, polymer degradation, and other materials aging processes. However, generating and measuring precise moisture concentrations is challenging due to the need to cover a broad concentration range (parts-per-billion to percent) and the affinity of moisture to a wide range surfaces and materials. This document will discuss the techniques employed by the Mass Spectrometry Laboratory of the Materials Reliability Department at Sandia National Laboratories to generate and measure known gaseous moisture concentrations. This document highlights the use of a chilled mirror and primary standard humidity generator for the characterization of aluminum oxide moisture sensors. The data presented shows an excellent correlation in frost point measured between the two instruments, and thus provides an accurate and reliable platform for characterizing moisture sensors and performing other moisture related experiments