The behavior of As in Ge containing regions doped with ∼5×10^20∕cc Al was studied. The solubility of As is enhanced tenfold or more by the heavy Al doping, on the basis of (1) measurements of conductivity type and (2) the negative results of a search for compounds by x‐ray diffraction. The behavior of As diffusion fronts was studied by observing the progress of the p‐n junction formed in Ge containing 10^(17)∕cc In. When a region of heavy Al doping was added, the p‐n junction was displaced. The displacements indicate that the diffusing As is attracted to regions of heavy Al doping. These results are similar to those of Reiss, Fuller, and others for Li in Si, though a detailed understanding is not yet available in the present case
Diffusion experiments with indium (In) in germanium (Ge) were performed in the temperature range bet...
The transient enhanced diffusion (TED) of As in silicon samples implanted at 35 keV with dose 5*1015...
Electronic structure calculations are used to predict the activation enthalpies of diffusion for a r...
The behavior of As in Ge containing regions doped with ∼5×10^20∕cc Al was studied. The solubility of...
The enhanced diffusion of donor atoms, via a vacancy (V)-mechanism, severely affects the realization...
The enhanced diffusion of donor atoms, via a vacancy (V)-mechanism, severely affects the realization...
The enhanced diffusion of donor atoms, via a vacancy (V)-mechanism, severely affects the realization...
Diffusion is the most fundamental mass transport process in solids characterized by point defect-dif...
This study presents a broad investigation on Al implantation in crystalline Ge. We show that up to 6...
We investigate phosphorus in-situ doping characteristics in germanium (Ge) during epitaxial growth b...
The diffusion and activation of arsenic implanted into germanium at 40 keV with maximum concentratio...
The diffusion coefficient of As in Ge has been deduced from the measurement of thermoelectric power ...
The understanding of dopant diffusion and its temperature dependance is technologically important in...
We present a lattice location study of the n-type dopant arsenic after ion implantation into germani...
Small angle x-ray scattering measurements were performed on arsenic-implanted laser-annealed silicon...
Diffusion experiments with indium (In) in germanium (Ge) were performed in the temperature range bet...
The transient enhanced diffusion (TED) of As in silicon samples implanted at 35 keV with dose 5*1015...
Electronic structure calculations are used to predict the activation enthalpies of diffusion for a r...
The behavior of As in Ge containing regions doped with ∼5×10^20∕cc Al was studied. The solubility of...
The enhanced diffusion of donor atoms, via a vacancy (V)-mechanism, severely affects the realization...
The enhanced diffusion of donor atoms, via a vacancy (V)-mechanism, severely affects the realization...
The enhanced diffusion of donor atoms, via a vacancy (V)-mechanism, severely affects the realization...
Diffusion is the most fundamental mass transport process in solids characterized by point defect-dif...
This study presents a broad investigation on Al implantation in crystalline Ge. We show that up to 6...
We investigate phosphorus in-situ doping characteristics in germanium (Ge) during epitaxial growth b...
The diffusion and activation of arsenic implanted into germanium at 40 keV with maximum concentratio...
The diffusion coefficient of As in Ge has been deduced from the measurement of thermoelectric power ...
The understanding of dopant diffusion and its temperature dependance is technologically important in...
We present a lattice location study of the n-type dopant arsenic after ion implantation into germani...
Small angle x-ray scattering measurements were performed on arsenic-implanted laser-annealed silicon...
Diffusion experiments with indium (In) in germanium (Ge) were performed in the temperature range bet...
The transient enhanced diffusion (TED) of As in silicon samples implanted at 35 keV with dose 5*1015...
Electronic structure calculations are used to predict the activation enthalpies of diffusion for a r...