This paper presents a preliminary study into stiction between parylene C and substrate surfaces for biocompatible check-valve applications. During fabrication, parylene C is used as the structural material for the check-valve. The substrate surfaces studied include Au, Al, Si, parylene C, XeF_2 treated Si, and silicon dioxide. Stiction between different surfaces is created after sacrificial photoresist etching. Then, the stiction is measured using blister tests, and stiction mechanisms for different materials are investigated. The devices are released with different recipes to examine their effects. Finally, the results of the study reveal methods to control the cracking pressure of parylene check-valves
Parylene-C has been deposited on bare Si wafers by physical vapor deposition using the SCS Coating S...
Parylene C is a promising material for constructing flexible, biocompatible and corrosion-resistant ...
Abstract—This paper presents the world’s first surface-micro-machined parylene dual-valved microflui...
This paper presents a preliminary study into stiction between parylene C and substrate surfaces for ...
Micro-fabricated biocompatible check valves are integral parts of many implantable micro-fluidic dev...
MEMS check valves with fixed cracking pressures are important in micro-fluidic applications where th...
We report here a surface micromachined leakage proof Parylene MEMS check valve that has nearly ideal...
This paper describes parylene as an emerging bioMEMS material. Parylene has the unique feature of ro...
This paper describes a new technique for strongly anchoring parylene (poly-para-xylylene) layers on ...
Parylene C (poly(monochloro-p-xylylene)) is a member of a unique family of thermoplastic, crystallin...
We present here the first surface-micromachined, normally closed, in-channel, Parylene check valve. ...
We present here a new surface-micromachined, all-parylene (para-xylylene), in-channel, normally-clos...
2019-04-26Parylene provides many advantages as a material for thin-film implantable devices, however...
Parylenes are used for a wide range of applications in microelectromechanical systems (MEMS) devices...
Parylenes are used for a wide range of applications in microelectromechanical systems (MEMS) devices...
Parylene-C has been deposited on bare Si wafers by physical vapor deposition using the SCS Coating S...
Parylene C is a promising material for constructing flexible, biocompatible and corrosion-resistant ...
Abstract—This paper presents the world’s first surface-micro-machined parylene dual-valved microflui...
This paper presents a preliminary study into stiction between parylene C and substrate surfaces for ...
Micro-fabricated biocompatible check valves are integral parts of many implantable micro-fluidic dev...
MEMS check valves with fixed cracking pressures are important in micro-fluidic applications where th...
We report here a surface micromachined leakage proof Parylene MEMS check valve that has nearly ideal...
This paper describes parylene as an emerging bioMEMS material. Parylene has the unique feature of ro...
This paper describes a new technique for strongly anchoring parylene (poly-para-xylylene) layers on ...
Parylene C (poly(monochloro-p-xylylene)) is a member of a unique family of thermoplastic, crystallin...
We present here the first surface-micromachined, normally closed, in-channel, Parylene check valve. ...
We present here a new surface-micromachined, all-parylene (para-xylylene), in-channel, normally-clos...
2019-04-26Parylene provides many advantages as a material for thin-film implantable devices, however...
Parylenes are used for a wide range of applications in microelectromechanical systems (MEMS) devices...
Parylenes are used for a wide range of applications in microelectromechanical systems (MEMS) devices...
Parylene-C has been deposited on bare Si wafers by physical vapor deposition using the SCS Coating S...
Parylene C is a promising material for constructing flexible, biocompatible and corrosion-resistant ...
Abstract—This paper presents the world’s first surface-micro-machined parylene dual-valved microflui...