Characterization of thin polymer films using terahertz time-domain interferometry

An interferometer for broadband single-cycle THz pulses is developed based on the Michelson configuration. Total internal reflection of THz pulses in high-resistivity silicon prisms provides a nearly 180° phase shift of one arm relative to the other to achieve destructive interference. We show that due to automatic compensation for laser fluctuations by the interferometer, it is possible to measure the index and absorption of thin-film samples with more accuracy than is achievable with standard THz time-domain spectroscopy. We demonstrate characterization of the complex index of refraction of 2 μm thick Mylar (polyester) films. By measuring the signal amplitude directly in the time domain, the interferometer can be used for rapid measurements of film thickness with a resolution of better than 1 μm.Peer reviewedElectrical and Computer Engineerin