Beam formation in a triode ion gun has been investigated. The gun consisted of a plasma ion source operated with argon, a low-potential cup extractor and an acceleration tube (diameter D). The ion optics of the system were studied by recording the current density profile of focussed 40 keV beams with the beam current as a parameter. Currents up to about 200 μA were obtained by increasing the plasma density in the ion source. Focussing was achieved by suitably adjusting the extractor potential. To get a comprehensive view of beam formation the following gun parameters were varied: extraction-gap distance (0.5≤d≤7 mm, adjustable in situ), extractor length (0.59≤ L D≤1.65), acceleration-gap distance (0.05≤ g D≤0.8), length...
Plasmas are used in semiconductor fabrication as they allow for very precise control over processes ...
Three triode extraction systems are simulated by IBSimu ion optical code for Amirkabir Helicon Ion S...
The article of record as published may be found at http://dx.doi.org/10.1063/1.1720264USDO
AbstractIn this work, historical review about different kinds of ion sources and their applications ...
The characteristics of the ion beam extracted from an ion sources were investigated using computer c...
89 p.Thesis (Ph.D.)--University of Illinois at Urbana-Champaign, 1980.Light ions offer several advan...
In this work, simulation of the singly charged argon ion trajectories for a variable plasma meniscus...
Ion beam formation by four-electrode ion optical system with slit finite length apertures is conside...
The energy spreads of ion beams generated from a penning ionization gauge-type ion source with elect...
An industrial type of Amirkabir helicon ion source (AHIS-II) equipped with a novel triode extraction...
Supersonic ion beam formation has been observed in a geometrically expanding low-pressure inductivel...
In this paper, the path of the extracted and focused ions by the electrostatic lense having three el...
Negative hydrogen (H$^−$) ion sources have a wide range of applications. The general requirement for...
A compact ion microbeam system, which comprises a three-stage acceleration lens and a duoplasmatron-...
The first experiment of extraction of ion beam from a beam-plasma ion source is described. Beam curr...
Plasmas are used in semiconductor fabrication as they allow for very precise control over processes ...
Three triode extraction systems are simulated by IBSimu ion optical code for Amirkabir Helicon Ion S...
The article of record as published may be found at http://dx.doi.org/10.1063/1.1720264USDO
AbstractIn this work, historical review about different kinds of ion sources and their applications ...
The characteristics of the ion beam extracted from an ion sources were investigated using computer c...
89 p.Thesis (Ph.D.)--University of Illinois at Urbana-Champaign, 1980.Light ions offer several advan...
In this work, simulation of the singly charged argon ion trajectories for a variable plasma meniscus...
Ion beam formation by four-electrode ion optical system with slit finite length apertures is conside...
The energy spreads of ion beams generated from a penning ionization gauge-type ion source with elect...
An industrial type of Amirkabir helicon ion source (AHIS-II) equipped with a novel triode extraction...
Supersonic ion beam formation has been observed in a geometrically expanding low-pressure inductivel...
In this paper, the path of the extracted and focused ions by the electrostatic lense having three el...
Negative hydrogen (H$^−$) ion sources have a wide range of applications. The general requirement for...
A compact ion microbeam system, which comprises a three-stage acceleration lens and a duoplasmatron-...
The first experiment of extraction of ion beam from a beam-plasma ion source is described. Beam curr...
Plasmas are used in semiconductor fabrication as they allow for very precise control over processes ...
Three triode extraction systems are simulated by IBSimu ion optical code for Amirkabir Helicon Ion S...
The article of record as published may be found at http://dx.doi.org/10.1063/1.1720264USDO