A mixed control oxidation model was used in Chapter 1 to reevaluate historical assumptions regarding diffusion controlled oxidation. Rather than assuming thermodynamic equilibrium at the scale/substrate interface (a fast chemical reaction), a mixed control model allows finite rates for both the diffusion process and the chemical reaction, which occur in series. This coupling of the two mechanisms by the interfacial oxygen concentration can result in kinetics that appear completely parabolic. However, the interfacial oxygen concentration may never reach the equilibrium thermodynamic value, and may in fact remain at a significant percentage of the atmospheric value, despite the apparently parabolic kinetics. In Chapter 2, siliconized silicon ...