Pressure measurement under high temperature environments is required in many engineering applications and it poses many practical problems. Pressure patterns are highly desirable for health monitoring for improved performance and accurate prediction of remaining life of systems used in various applications. Data acquisition in harsh environments has always been a major challenge to the available technology. Sensing becomes more intricate in case if it has to operate under extreme conditions of temperature. Propulsion system applications represent one such area that requires a sensor that is absolutely accurate and has utmost sensitivity coupled with the ability to withstand high temperature. The need for such sensors is driven by the depend...
A silicon on silicon pressure sensor has been developed for use at very high temperatures (1000 F). ...
A high speed, durable, ion probe based pressure sensor is being investigated for use in pulse detona...
We report the first demonstration of MEMS-based 4H-SiC piezoresistive pressure sensors tested at 750...
Robust, miniaturized sensing systems are needed to improve performance, increase efficiency, and tra...
Un-cooled, MEMS-based silicon carbide (SiC) static pressure sensors were used for the first time to ...
Ce papier présente un capteur de pression basé sur l'effet Pirani, pour des applications de mesures ...
The development of new aircraft engines requires the measurement of pressures in hot areas such as t...
Pressure measurement in high temperature environments is important in many applications to provide v...
In this thesis, the design of micromachined pressure sensors for application in fast response aerody...
MEMS-based 4H-SiC piezoresistive pressure sensors have been demonstrated at 800 C, leading to the di...
We have performed the initial characterization of single crystal 4H silicon carbide (4H-SiC) pressur...
The measurement of engine emissions is important for their monitoring and control. However, the abil...
In this paper, the development and characterization of a packaged pressure sensor system suitable fo...
Utilizing in situ dynamic pressure measurement is a promising novel approach with applications for b...
The high-temperature pressure sensors have wide applications in aerospace, petroleum, geothermal exp...
A silicon on silicon pressure sensor has been developed for use at very high temperatures (1000 F). ...
A high speed, durable, ion probe based pressure sensor is being investigated for use in pulse detona...
We report the first demonstration of MEMS-based 4H-SiC piezoresistive pressure sensors tested at 750...
Robust, miniaturized sensing systems are needed to improve performance, increase efficiency, and tra...
Un-cooled, MEMS-based silicon carbide (SiC) static pressure sensors were used for the first time to ...
Ce papier présente un capteur de pression basé sur l'effet Pirani, pour des applications de mesures ...
The development of new aircraft engines requires the measurement of pressures in hot areas such as t...
Pressure measurement in high temperature environments is important in many applications to provide v...
In this thesis, the design of micromachined pressure sensors for application in fast response aerody...
MEMS-based 4H-SiC piezoresistive pressure sensors have been demonstrated at 800 C, leading to the di...
We have performed the initial characterization of single crystal 4H silicon carbide (4H-SiC) pressur...
The measurement of engine emissions is important for their monitoring and control. However, the abil...
In this paper, the development and characterization of a packaged pressure sensor system suitable fo...
Utilizing in situ dynamic pressure measurement is a promising novel approach with applications for b...
The high-temperature pressure sensors have wide applications in aerospace, petroleum, geothermal exp...
A silicon on silicon pressure sensor has been developed for use at very high temperatures (1000 F). ...
A high speed, durable, ion probe based pressure sensor is being investigated for use in pulse detona...
We report the first demonstration of MEMS-based 4H-SiC piezoresistive pressure sensors tested at 750...