Preparation and Properties of In-Situ Devices Using the SALD and SALDVI Techniques

One of the many advantages of Selective Area Laser Deposition (SALD) and Selective Area Laser Deposition Vapor Infiltration (SALDVI) is that they can be used to embed in-situ micro-sensors within macro-components. A single-point SiC/C thermocouple sensor embedded within a SiC macro-component and electrically insulated with silicon nitride layers has been demonstrated. In many applications, multi-point sensors within a single component are needed, e.g., in monitoring the temperature gradient and distribution at different positions. In this paper, multi-point thermocouple devices are demonstrated. The macro-component is a SiC bulk shape made by infiltrating vapor deposited silicon carbide into a silicon carbide powder bed using the SALDVI technique. Multiple SiC/C thermocouples are embedded in-situ in the SiC bulk shape using the SALD technique. The transient and steady state responses ofthe embedded thermocouples are compared to reference thermocouples probing the surfaces of the bulk shape.Mechanical Engineerin