Fast piezoelectric scanning MEMS mirror for 1D ion adressing
- Janin, Paul
- Bauer, Ralf
- Griffin, Paul
- Riis, Erling
- Uttamchandani, Deepak
Publication date
December 2019
DOI Publisher
Institute of Electrical and Electronics Engineers (IEEE)Abstract
We present a small-scale piezoelectric MEMS micromirror, with resonant frequencies above 300 kHz for 1D scanning. The device is intended for higher frequency operation by reducing the scale of existing designs, and was fabricated using a multi-user silicon-on-insulator process. The performance of the mirror for addressing points along one axis was demonstrated using a free-space optics experimental setup
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