Silicon Dioxide as Mechanical Structure Realized by Using Trench-Etching and Oxidation Process

AbstractThick silicon dioxide with good heat insulation properties can reduce the parasitic capacitance and heat conductivity in sensors and actuators. This research focuses on the evaluation of the mechanical properties of the silicon dioxide microstructure fabricated by using trench etching and oxidation process in order to use it for movable elements in MEMS devices. The elastic modulus is estimated from the resonant frequency of fabricated cantilevers. It revealed comparable values to that of bulk SiO2. Non-linear characteristics such as hardening and softening spring effects are observed dependent on the patterning direction of trench etching