Thermal flow sensors for MEMS spirometric devices
- Hedrich, F.
- Kliche, K.
- Storz, M.
- Ashauer, H.
- Zengerle, R.
DOIAbstract
AbstractIn recent years, the need for controlling the patients breathing over a long duration time has become more and more important.Among this application the measurements of high flow rates are asked in different fields. A new development of a micromachined thermal flow sensor is presented with its specific integration for spirometric applications. The sensor shows a high accuracy, a short response time (<1 ms.) and a low power consumption (10mW). Furthermore heating structures are added on the chip to prevent condensation. Hence it represents an attractive solution for portable equipment for preventive exploration of breathing in home care applications
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