Tuneable IR Photodetectors for Spectroscopic Applications
- Antoszewski, J.
- Nguyen, T.
- Silva, K.K.M.B.D.
- Faraone, L.
DOIAbstract
AbstractThe concept and realisation of infrared micro-spectrometers using MEMS based Fabry-Pérot micro-filters integrated with IR photo-detectors are presented. By using five layer mirror structures, and stress optimisation in mirrors and actuators the tuning range from 1700nm to 2300nm has been achieved with maximum actuation voltage of only 18V RMS. The average FWHM of the transmission peak was measured to be 35nm, predominantly limited by thickness nonuniformity of individual mirror layers
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