Effects of excimer laser annealing on low-temperature solution based indium-zinc-oxide thin film transistor fabrication

AbstractA Solution Based Indium-Zinc-Oxide thin-film transistor (TFT) with a field-effect mobility of 0.58cm2/Vs, a threshold voltage of 2.84V by using pulse laser annealing processes. Indium-zinc-oxide (IZO) films with a low process temperature were deposited by sol-gel solution based method and KrF excimer laser annealing (wavelength of 248nm). Solution based indium-zinc-oxide (IZO) films usually needs high temperature about 500°C post annealing in a oven. KrF excimer laser annealing shows advantages of low temperature process, the less process time deceases to only few seconds was used to replace the high temperature process. IZO thin films suffering laser irradiation still keeps the amorphous film quality by transmission electron microscopy (TEM) diffraction pattern analysis. It could be expected this technology to large-area flexible display, in the future