In situ Calibration of Wall Shear Stress Sensor For micro Fluidic Application

AbstractThe purpose of this paper is to propose two types of wall shear stress sensor based on MEMS-technology. The wall shear stress sensor's operation is based upon the principle of hot wire anemometry. The sensing element is made of polysilicon or platinium resistors. The latter has to be thermally isolated from the substrate by a sealed or open cavity to minimize the heat exchange with the substrate. Fabrication of the shear stress sensor requiring only three masks levels where the hot wire (in polycrystalline silicon or platinium). The static calibration in low speed air flow facility shows that the sensor behaves like a wall shear stress sensor. In situ calibration in wind tunnel is performed by wireless technologies