AbstractAn enhanced flow sensor is under development at IMTEK to enable simultaneous fluid characterization and flow velocity measurement. Simultaneous measurement of fluid thermal properties is necessary to measure flow rates accurately by thermal means in cases where fluid properties fluctuate in time. Here, we report the design and the fabrication of our 2D flow sensor consisting of one heater and five thermistors and present the influence of specific heat capacity of fluids on the measurement signals through FEM simulations. The results show that phase shift depends less on specific heat capacity (cP) than the thermal conductivity (λ)
A review is given on sensors fabricated by silicon micromachining technology using the thermal domai...
A simple silicon two-dimensional (2D) flow sensor for the measurement of both flow direction and spe...
AbstractA flow sensor is being developed at IMTEK to perform flow measurements independently of a fl...
We present finite element method (FEM) simulations of a thermal flow sensor as well as a comparison ...
We present a thermal flow sensor designed for measuring air as well as water flow velocities in heat...
A micromechanically fabricated thermal flow sensor working on the principle of a travelling heat pul...
This paper presents a unified theory for different measurement concepts of a thermal flow sensor. Ba...
In this thesis thermal sensor-actuator structures are proposed for measuring the parameters pressure...
AbstractA flow sensor is being developed at IMTEK to simultaneously measure gas flow and its thermal...
This paper focuses on the development of highly sensitive calorimetric flow sensors. Both the hydrod...
AbstractA thermal sensor has been developed at IMTEK to perform flow measurement and fluid character...
Abstract—To compensate for changes in ambient temperature, thermal flow sensors are usually heated t...
AbstractA novel dual-Thermal conductivity detector (TCD) is presented for in-line flow compensation....
In this work, a novel approach is presented for in-line flow compensation using a dual-Thermal condu...
Conventional thermal conductivity detectors (TCDs) demonstrate a flow dependence. The approach prese...
A review is given on sensors fabricated by silicon micromachining technology using the thermal domai...
A simple silicon two-dimensional (2D) flow sensor for the measurement of both flow direction and spe...
AbstractA flow sensor is being developed at IMTEK to perform flow measurements independently of a fl...
We present finite element method (FEM) simulations of a thermal flow sensor as well as a comparison ...
We present a thermal flow sensor designed for measuring air as well as water flow velocities in heat...
A micromechanically fabricated thermal flow sensor working on the principle of a travelling heat pul...
This paper presents a unified theory for different measurement concepts of a thermal flow sensor. Ba...
In this thesis thermal sensor-actuator structures are proposed for measuring the parameters pressure...
AbstractA flow sensor is being developed at IMTEK to simultaneously measure gas flow and its thermal...
This paper focuses on the development of highly sensitive calorimetric flow sensors. Both the hydrod...
AbstractA thermal sensor has been developed at IMTEK to perform flow measurement and fluid character...
Abstract—To compensate for changes in ambient temperature, thermal flow sensors are usually heated t...
AbstractA novel dual-Thermal conductivity detector (TCD) is presented for in-line flow compensation....
In this work, a novel approach is presented for in-line flow compensation using a dual-Thermal condu...
Conventional thermal conductivity detectors (TCDs) demonstrate a flow dependence. The approach prese...
A review is given on sensors fabricated by silicon micromachining technology using the thermal domai...
A simple silicon two-dimensional (2D) flow sensor for the measurement of both flow direction and spe...
AbstractA flow sensor is being developed at IMTEK to perform flow measurements independently of a fl...