Magnetic Nanocrystals Modified Epoxy Photoresist for Microfabrication of AFM probes
- Ingrosso, C.
- Martin, C.
- Llobera, A.
- Perez Murano, F.
- Innocenti, C.
- Sangregorio, C.
- Voigt, A.
- Gruetzner, G.
- Brugger, J.
- Striccoli, M.
- Agostiano, A.
- Curri, M.L.
DOIAbstract
AbstractA novel magnetic nanocomposite based on a negative tone epoxy photoresist and magnetic colloidal Fe2O3 nanocrystals (NCs) has been manufactured. The magnetic properties and the UV-photostructurability of the nanocomposite have been investigated. After the incorporation, the Fe2O3 NCs preserve their magnetism which is conveyed to the photoresist and retained after the UV-lithography process. High aspect ratio 3D microstructures have been fabricated by processing the nanocomposite with conditions comparable to those used for the pure photoresist. AFM probes on the Fe2O3 NC modified photoresist have been fabricated to confirm suitability and applicability of the preparation procedure and of the novel nanocomposite
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