A cost of ownership model for CVD processes

AbstractThe market for compound semiconductor based devices, while much smaller than silicon based devices, continues to expand. Several types of products have now reached the stage of significant manufacturing volumes, including light-emitting diodes (LEDs), laser diodes (LDs), solar cells and photocathodes. Electronic devices, such as HEMTs and HBTs, are also increasing in volume to fill a need in the cellular phone, DBS, and other high frequency marketplaces. All of these devices are based on bandgap engineering and require one or more epitaxial layers. Growing these epitaxial layers has traditionally been a low volume and expensive process, typically on single small wafers or pieces of wafers