In-situ Surface Modification of Microfluidic Channels by Integrated Plasma Source

AbstractIn-situ modification of originally hydrophobic polymer surfaces by local plasma enhanced oxidation and its application in electrically controlled fluid capillary systems are demonstrated. A microfabricated coplanar dielectric barrier discharge (DBD) plasma source was developed [1,2], integrated and applied to modify in-situ the surface properties of polydimethylsiloxane (PDMS) capillary channels. The local, immediate and successful setting of the wettability of the polymer microchannels is proved by development of effective water transport in the system subsequently the plasma treatment. The use of microfluidically integrated DBD microplasma system as switchable capillary pump is also presented