Vacuum and Residual Gas Composition MEMS Sensor

AbstractThe paper presents a MEMS-type vacuum and residual gas composition sensor, which in contrast to the other miniature sensors, works in medium and high vacuum (10−5−10Pa). It operates on the principle of ionization of gases inside a silicon-glass microchamber. Pressure is estimated on the basis of the discharge current value, and gas composition − on the basis of spectra of the glowing gases, recorded by a miniature fiber spectrometer