Optical Properties of Diamond-like Carbon Films for Antireflection Coating by RF Magnetron Sputtering Method

AbstractDiamond-like Carbon (DLC) film has the ability to change the refractive index (n) value achieved high transmittance for potential applications of antireflection coating. The DLC films were coated onto D263T glass substrates at room temperature by radio frequency (RF) magnetron sputtering method. From the results of UV/VIS spectrophotometer analysis of single-layer DLC film, which shows an absorption wavelength (λ) ranged from 380nm to 950nm, the average reflectance of the film is 12.66% with the deposition time of 3hrs. It was found that DLC film with high transmittance was due to the highest ID/IG ratio of 1.71