Piezoresistivity and its Applications in Nanomechanical Sensors

AbstractPiezoresistivity is continuing to find novel applications in modern sensors technology. In this study, we discuss the applications and design requirements of a piezoresistive microcantilever for use in AFM and biosensor. The cantilevers are made of silicon with p-doped piezoresistor inside. Three cantilever designs for each application are analyzed using finite element analysis software. Tip force and bi-axial tensile force are used to simulate the AFM and biosensor behavior, respectively. Results showed that the design principles for AFM and biosensor are fundamentally different and that the sensitivity of AFM increases with cantilever length but that of biosensor is relatively unaffected