AbstractThree custom-made Al0.2Ga0.8As p-i-n mesa X-ray photodiodes (200µm diameter, 3µm i layer) were electrically characterised and investigated for their response to illumination with soft X-rays from an 55Fe radioisotope X-ray source (Mn Kα = 5.9keV; Mn Kβ = 6.49keV). The AlGaAs photodiodes were shown to be suitable for photon counting X-ray spectroscopy at room temperature. When coupled to a custom-made low-noise charge-sensitive preamplifier, a mean energy resolution (as quantified by the full width at half maximum of the 5.9keV photopeak) of 1.24keV was measured at room temperature. Parameters such as the depletion width (1.92µm at 10V), charge trapping noise (61.7 e−rms ENC at 5V, negligible at 10V) and the electronic noise componen...