Research on Dynamic Calibration of Piezo-two-dimensional Force Sensor

Based on the piezoelectric effect of piezoelectric quartz crystal, a two-dimensional force sensor with good dynamic characteristics is designed, whose sensitive component is single-cut piezoelectric quartz wafers, and it realizes the measurement of force by measuring the charge which is generated by piezoelectric quartz crystal. This paper analyzes measurement principle of the sensor based on the mechanics of materials and gives structure of the sensor. Dynamic calibration system of the sensor is designed, and the curves between sensor output and input are obtained by dynamic calibration experiment and data analysis. This article provides a new way of thinking for in-depth study in dynamic calibration of the sensor and accurate measurement