Method for Measurement of Multi-Degrees-of-Freedom Motion Parameters Based on Polydimethylsiloxane Cross-Coupling Diffraction Gratings

Abstract This work presents a multi-degrees-of-freedom motion parameter measurement method based on the use of cross-coupling diffraction gratings that were prepared on the two sides of a polydimethylsiloxane (PDMS) substrate using oxygen plasma processing technology. The laser beam that travels pass the cross-coupling optical grating would be diffracted into a two-dimensional spot array. The displacement and the gap size of the spot-array were functions of the movement of the laser source, as explained by the Fraunhofer diffraction effect. A 480 × 640 pixel charge-coupled device (CCD) was used to acquire images of the two-dimensional spot-array in real time. A proposed algorithm was then used to obtain the motion parameters. Using this method and the CCD described above, the resolutions of the displacement and the deflection angle were 0.18 μm and 0.0075 rad, respectively. Additionally, a CCD with a higher pixel count could improve the resolutions of the displacement and the deflection angle to sub-nanometer and micro-radian scales, respectively. Finally, the dynamic positions of hovering rotorcraft have been tracked and checked using the proposed method, which can be used to correct the craft’s position and provide a method for aircraft stabilization in the sky